美国CTI On-Board低温泵简介

CTI Cryogenics On Board Cryopumps

• CTI-Cryogenics' pioneering cryopumps with fully integrated controls and supporting peripherals speeds integration and system operation

• Consistent process performance

• Higher tool productivity via significantly increased cryopump uptime

• Regenerates in half to one-third the time of a typical Cryo-Torr® cryopump application

• Fast Regen capability extends cryopump performance between regenerations

• Simultaneous regeneration capability, enabled by networking your cryopumps, speeds overall system regeneration, increasing tool uptime

• GOLDLink® compatible for productivity protection 24/7, worldwide

• Backed by legendary Helix service and support, worldwide